硅光子学
光电子学
硅
光子学
材料科学
氮化硅
混合硅激光器
氮化物
纳米技术
图层（电子）
作者
Sujith Chandran,Yusheng Bian,Won Suk Lee,Ahmed Abumazwed,Neng Liu,Luhua Xu,Hanyi Ding,Abdelsalam Aboketaf,Michał Rakowski,Kevin Dezfulian,Arman Najafi,Takako Hirokawa,Qidi Liu,Andy Stricker,Subramanian Krishnamurthy,Kate McLean,Ryan Sporer,Michelle Zhang,Shenghua Song,Helen Wong
标识
DOI：10.1364/ofc.2024.th3h.4
摘要
We demonstrate low-loss silicon nitride passive optical components including straight and bend waveguides, 1×2MMI, 2×2MMI, directional-coupler and waveguide crossings on a monolithic silicon photonics platform. Hardware performance statistics substantiate the mass manufacturability of the building-blocks.
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