High transparent conductive Mg, Al and Ga co-doped ZnO multilayer thin films with Cu interlayer: Fabrication, structure, and characteristics

Overcoming the challenge of preparing high-transparency and low-resistivity thin films is of great significance for the development of indium-free transparent electrodes. In the present work, high-quality Mg, Al, and Ga co-doped ZnO (MAGZO)/Cu/MAGZO multilayer thin films are deposited on glass by magnetron sputtering. The effects of Cu layer thickness (