Low Parasitic Error Nano-Scanner With Multilayer Bionic Structures for Precision Measurements

Abstract The paper presents a high-stiffness, low-parasitic-error piezoelectric nano-scanner designed for precision measurement applications. This scanner meets the requirements for ultra-precision measurements, such as optical focusing and vertical scanning movements. The guide-drive-guide multi-layer structural design enhances out-of-plane stiffness and achieves a compact layout. The fishbone-inspired over-constrained guiding mechanism enables precise linear motion and enhances stiffness decoupling in the orthogonal direction, theoretically eliminating parasitic motion. An equivalent stiffness model for the multilayer bio-inspired over-constrained structure is established using elastic beam theory, which serves as a guide for the parametric design of the platform’s stiffness. The design of low parasitic motion and modal decoupling characteristics was verified through finite element simulation by conducting static analysis and modal simulation of the motion platform. In addition, simulation results confirm that the proposed nano-scanner maintains stable dynamic performance under various loading conditions, further validating its design reliability. These comprehensive analyses not only support the theoretical models but also demonstrate the practical feasibility of implementing such a system in ultra-precision applications. Consequently, this work lays a solid foundation for future advancements in nano-scale measurement technology and high-precision. The proposed approach offers a promising route to overcoming limitations inherent in traditional scanning stages, such as limited load capacity and coupling errors, thereby ensuring enhanced measurement accuracy and efficiency.