Thermal stability study of diamond-like carbon thin films by using Raman spectroscopy

Smooth diamond like carbon(DLC)thin films are fabricated on silicon substrate by using filted cathodic vacuum arc(FCVA)deposition system.DLC thin films thermal stability is studied by using multi-wavelength laser excited by Raman spectroscopy.The experiment shows that thin films′microscopic structures can remain unchanged and stable when the films are thermally processed at a temperature of below 400℃.When the process temperature is raised to 600℃,the DLC films' atomic contents start to undergo subtle transformation,which is reviewed as metastable state.When the temperature is raised to800~1 000℃,DLC films start to change dramatically,and they will be graphitized and their physical characteristics cannot keep relatively stable.