等离子体增强化学气相沉积
材料科学
化学气相沉积
图层(电子)
氧化物
接触电阻
薄膜
雕刻
量子效率
光电子学
钝化
太阳能电池
复合材料
纳米技术
冶金
作者
Benjamin Grübel,H. Nagel,Bernd Steinhauser,Frank Feldmann,Sven Kluska,Martin Hermle
标识
DOI:10.1002/pssa.202100156
摘要
In typical industrial processing of tunnel oxide passivated contact (TOPCon) solar cells, poly‐Si is deposited on the entire back of the cells. During the deposition process, a wrap‐around of poly‐Si onto the edges and the front side of the cells is virtually unavoidable if chemical vapor deposition processes are used. Plasma‐enhanced chemical vapor deposition (PECVD) is used to investigate very thin poly‐Si films and their effect on wrap‐around on bifacial TOPCon solar cells fabricated without wrap‐around etching. As a result, reduction of the poly‐Si thickness down to 30 nm significantly increases the shunt resistance, reduces the reverse bias current, and thus reduces the risk of hot spots as measured by IR imaging and microcharacterization by secondary electron microscopy. Electroplated metallization proves to be a suitable candidate for contacting such thin TOPCon layers, being less sensitive than screen‐printed metallization.
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