氮化硅
氮化物
化学
硅
纳米技术
化学工程
材料科学
有机化学
工程类
图层(电子)
标识
DOI:10.1070/rc1995v064n04abeh000151
摘要
Methods of preparing silicon nitride and materials as powders, and as materials consolidated from the powders, and also as films and coatings, are reviewed. Information on the structure and on the physicochemical properties of silicon nitride materials is analysed and discussed. The bibliography includes 172 references.
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