Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

We used a system that exploits the Mach–Zehnder interferometer structure and Young’s double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision. Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 × 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%.