On the morphology of porous silicon layers obtained by an electrochemical method
作者
Gabriel Crăciun,A. Dafinei,C. Vrînceanu,Eugeniu Vasile,Costel Flueraru
标识
DOI:10.1109/smicnd.1995.495030
摘要
Porous silicon obtained in different electrochemical conditions was investigated by optical and Scanning Electron Microscopy (SEM). This paper includes an analysis of the SEM micrographs with evaluation of the pores' size, thickness and the etch rate of the porous silicon layer.