微加工
光刻
光掩模
洁净室
材料科学
数字微镜装置
软光刻
聚二甲基硅氧烷
快速成型
微流控
光刻胶
平版印刷术
制作
纳米技术
薄脆饼
微电子
光电子学
抵抗
替代医学
图层(电子)
医学
病理
复合材料
作者
Dhanesh G. Kasi,Mees N. S. de Graaf,Paul Motreuil-Ragot,Jean-Phillipe M. S. Frimat,Michel D. Ferrari,P.M. Sarro,Massimo Mastrangeli,Arn M. J. M. van den Maagdenberg,Christine L. Mummery,Valeria V. Orlova
出处
期刊:Micromachines
[Multidisciplinary Digital Publishing Institute]
日期:2021-12-29
卷期号:13 (1): 49-49
被引量:32
摘要
Organ-on-a-chip (OoC) and microfluidic devices are conventionally produced using microfabrication procedures that require cleanrooms, silicon wafers, and photomasks. The prototyping stage often requires multiple iterations of design steps. A simplified prototyping process could therefore offer major advantages. Here, we describe a rapid and cleanroom-free microfabrication method using maskless photolithography. The approach utilizes a commercial digital micromirror device (DMD)-based setup using 375 nm UV light for backside exposure of an epoxy-based negative photoresist (SU-8) on glass coverslips. We show that microstructures of various geometries and dimensions, microgrooves, and microchannels of different heights can be fabricated. New SU-8 molds and soft lithography-based polydimethylsiloxane (PDMS) chips can thus be produced within hours. We further show that backside UV exposure and grayscale photolithography allow structures of different heights or structures with height gradients to be developed using a single-step fabrication process. Using this approach: (1) digital photomasks can be designed, projected, and quickly adjusted if needed; and (2) SU-8 molds can be fabricated without cleanroom availability, which in turn (3) reduces microfabrication time and costs and (4) expedites prototyping of new OoC devices.
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