Laser CCD Micro-displacement Measurement System Studies Based on Michelson Interferometer

An laser system for testing dynamic micro-displacement automatically is introduced.The system is taking He-Ne laser as light source,deploies the system of eliminating noise,the system of frequency conversion and differentiating direction,the high speed development of CCD video signal gather system,the processing system of personal computer and interference picture handling software wraps,the system realize accurate measurement of micro-displacement based on phase modulation.Its precision,error,sensitivity and stability have greater raising than traditional measurement technique,the full automatic measure of micro-displacement is realized.