Nanometer Positioning Using AC Linear Motor and Rolling Guide. (2nd Report). Tribology of the Rolling Guide.

Tribology and micro-dynamics of a one-axis stage mechanism guided by a rolling ball guide, which achieved nanometer positioning, are studied. The force-to-displacement relationship consists of three displacement regions. In the first region of less than 100 nm displacement, the balls of the guide act as a linear spring. In the third region of over 100 μm displacement, normal rolling takes place. The second region has characteristics intermediate between those of first and the third. Static and dynamic regional transitions between these three are studied. Changes of the characteristics are measured for different positions and different load pressures. The force-to-velocity relationship of the guide is measured. Suitability of the rolling guide to fine positioning is discussed.