Fabrication of Tandem-type Vertically Integrated Nanogenerator by In-situ Deposition of AlN/ZnO Films

In this paper, we present a tandem-type vertically integrated nanogenerator (TVING) device with five layers of alternately stacked thin films (AlN/ZnO/AlN/ZnO/AlN). The TVING device shows about twice larger output voltages than the conventional VING device with three layers of stacked thin films (AlN/ZnO/AlN). Moreover, the TVING device can be fabricated in a tandem-type structure simply through the vertical integration of two similar VING devices. This device will be usefully applied for biocompatible micro-energy harvesting systems.