Enhanced resistive switching performance of TiO2 based RRAM device with graphene oxide inserting layer

Abstract In this work, graphene oxide (GO)/TiO 2 heterostructures for resistive random access memory devices were fabricated, and the composition and microstructure of TiO 2 and GO were characterized by x-ray diffraction, Raman spectroscopy, scanning electronic microscopy, and transmission electron microscopy. The resistive characteristics of the fabricated devices were investigated, and the remarkable improvement in cycle-to-cycle uniformity and high ON/OFF ratio of the TiO 2 thin film-based memory device were realized by introducing a thin GO layer. The formation/rupture of the conductive filament through the migration of oxygen vacancies in the TiO 2 substrate was responsible for the resistive switching. Owing to the different activation energies of reduction and oxidation of the GO, the set voltage became larger than the reset voltage. According to the linear fitting of double logarithm I – V plots, the conduction mechanism in low and high resistance states was governed by the ohmic mechanism and trap-controlled space charge limited current, respectively. The oxygen migration-induced oxidation/reduction in GO rendered it a good oxygen vacancy reservoir, which is responsible for the enhanced cycle-to-cycle uniformity and high ON/OFF ratio.