Rapid oxygen plasma treatment of tin oxide layers for improving the light stability of perovskite solar cells

Abstract Surface treatment of SnO 2 as an electron transport layer is essential for improving charge transport and device performance in the fabrication of perovskite solar cells. In this study, oxygen plasma with a controlled ion–radical composition ratio was used for rapid surface treatment to clean the surface of SnO 2 , and its performance was compared with that of the conventional UV–ozone treatment. Consequently, the plasma treatment succeeded in increasing the processing speed up to 40 times faster than that required for the conventional UV–ozone pretreatment. Furthermore, plasma pretreatment improved the photostability of solar cells.