蚀刻(微加工)
材料科学
薄膜
干法蚀刻
沉积(地质)
化学气相沉积
物理气相沉积
复合材料
光电子学
纳米技术
图层(电子)
地质学
古生物学
沉积物
摘要
Evaluation of the wet etching properties of several different thin film oxidesgrown by physical vapour deposition was performed in this work. MgO, Al2O3,SiO2, TiO2, HfO2 ZrO2 and Y2O3 were coated o ...
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