Micro-electromechanical System Gas SensorsBased on CeO2 Nanoparticles

In this study, X-ray diffraction (XRD) analysis was used to show that cerium oxide (CeO 2 ) nanoparticles have a face-centered cubic structure.CeO 2 thin films on micro-electromechanical system (MEMS) gas sensors, which are used to test their sensitivity to hydrogen (H 2 ), were prepared by dip coating.The test power of 116 mW (~300 ℃) is the power consumption of different gas concentrations.Different gases such as NH 3 , CO, and NO 2 were also tested and compared.The results showed that CeO 2 has a higher response at 50 ppm than at other concentrations.The structure of the CeO 2 material and its reaction mechanism with H 2 were examined and discussed.