材料科学
薄脆饼
制作
场离子显微镜
平版印刷术
聚焦离子束
光电子学
纳米技术
离子束
光学显微镜
表面光洁度
氦
光学
离子
扫描电子显微镜
梁(结构)
复合材料
病理
物理
原子物理学
医学
量子力学
替代医学
作者
Chenyi Zhang,Jinxin Li,Alex Belianinov,Zhao Ma,C. Kyle Renshaw,Ryan M. Gelfand
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2020-08-28
卷期号:31 (46): 465302-465302
被引量:8
标识
DOI:10.1088/1361-6528/abae99
摘要
We demonstrate a simple three-step gold thin-film sample preparation process to enhance the morphology and lithographic precision using helium ion based direct-writing. The procedure includes metal deposition, heat treatment and template stripping, which produce smooth monocrystalline gold grains with sizes up to 500 nm and an average surface roughness of 0.267 nm. By using a helium ion microscope, we can fabricate structures with feature sizes less than 20 nm in a 100 nm thick gold film with high-quality sidewalls. We demonstrate the efficacy of this technique by producing high-quality double nanohole (DNH) nanoapertures for single nanoparticle trapping in a single grain of 100 nm thick gold. This procedure can be applied to a wide range of antenna geometries and features that need to be fabricated producing optical and or electronic devices.
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