Chemical Mechanical Polishing of Stainless Steel as Solar Cell Substrate

Recently, stainless steel has been widely used as the solar cell substrate. In this paper, chemical mechanical polishing technique was employed to prepare the ultra-smooth 316L stainless steel surface for such application. The effects of solid content, pH, H 2 O 2 and benzotriazole (BTA) on the polishing performance of 316L stainless steel were investigated. The results indicated that, at pH 4.00, with the increase in the H 2 O 2 concentration, the MRR first dramatically increases due to the fact that, with the addition of small amount of H 2 O 2 , a porous outer layer mainly consisting of iron-enriched oxides with relatively low mechanical strength of the bilayer-structure oxide film is rapidly formed on the surface. After reaching the maximum value, the MRR gradually decreases since the outer layer gradually grows compact by the transformation of γ-FeOOH into α-FeOOH and even into α-Fe 2 O 3 . With the addition of BTA, the MRR can be suppressed, which is probably attributed to the formation of BTA passivating film on the top surface. Finally, a two-step polishing method was proposed, by which the ultra-smooth 316L stainless steel surface with the surface roughness R a about 2.0 nm can be achieved within 30 min and it can be subsequently used for thin-film solar cells.