A 3-DOF multi-mode parallel positioning platform utilizing piezoelectric- electromagnetic hybrid actuation

Abstract To improve the overall performance of 3-DOF parallel position platforms such as resolution, travel range, and linearity, this study proposes a novel compact piezoelectric-electromagnetic platform (PEP). The platform supports motion in XYθZ directions and operates in three working types: high-speed mode (HSM), low-speed stepping mode (LSM), and high-precision positioning mode (HPM). The PEP utilizes signal control to switch modes, enabling tasks such as rapid movement, precise positioning, and fine position adjustments. It also supports object rotation for orientation adjustments. Theoretical model was established to analyze the working principle of the actuator. A prototype was fabricated, assembled, and tested in a series of experiments to evaluate its performance across the three modes. The experimental results demonstrate the following: the PEP achieves a resolution of 20 nm in HPM, continuous and stable minimum rotary step movement of 0.37 μrad, and a linear coupling of less than 3.5%. The maximum forward and backward speeds reach 2681 μm/s and 2697.5 μm/s, respectively, under 100 VPP and 300 Hz. The piezoelectric-electromagnetic hybrid structure proposed in this study not only simplifies structural design but also delivers excellent output performance.