铁电性
动态随机存取存储器
频道(广播)
场效应晶体管
晶体管
非易失性存储器
随机存取
计算机科学
随机存取存储器
领域(数学)
材料科学
光电子学
电子工程
计算机硬件
工程类
电气工程
半导体存储器
电信
计算机网络
数学
电压
电介质
纯数学
作者
Jing Liang,Peng Yuan,Yong Yu,Jinjuan Xiang,Zhengyong Zhu,Menglong Zhou,Feng Shao,Yanan Lu,Jin Dai,Sangdon Yi,Guilei Wang,Jing Zhang,Bryan Kang,Chao Zhao
标识
DOI:10.35848/1347-4065/ad455b
摘要
Abstract In this paper, the memory characteristics of In-Ga-Zn-O (IGZO)-channel ferroelectric FETs (FeFETs) with stackable vertical channel-all-around structure are investigated by technology computer-aided design (TCAD) simulation. The simulated drain current–gate voltage ( I DS – V GS ) curves of the IGZO FeFET show an on–off ratio of up to 10 7 and a memory window of 1.76 V, proving that ferroelectric hafnium oxide (FE-HfO 2 ) is suitable for a 2T0C transistor. To solve the potential current-sharing problem of the 2T0C dynamic random access memory (DRAM) array, an advanced operation design methodology is proposed, which utilizes the bipolar polarization characteristics of FE-HfO 2 . This solution shows a remarkable current ratio between data “1” and data “0”, not only demonstrating the feasibility of the IGZO-based FeFET on 2T0C DRAM memory cells, but also providing an array design guideline for highly reliable 2T0C memory applications.
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