化学气相沉积
半最大全宽
阴极发光
拉曼光谱
钻石
材料科学
钨
杂质
分析化学(期刊)
Crystal(编程语言)
单晶
蛋白质丝
化学
纳米技术
光电子学
结晶学
发光
光学
复合材料
冶金
物理
有机化学
程序设计语言
色谱法
计算机科学
作者
Shinya Ohmagari,Hideaki Yamada,Hamao Umezawa,Akiyoshi Chayahara,Tokuyuki Teraji,Shinichi Shikata
标识
DOI:10.1016/j.diamond.2014.06.001
摘要
Hot filament chemical vapor deposition (HFCVD) possesses a large potential to scale-up for the growth of single-crystal diamond (SCD). This study investigates the crystalline qualities of SCD fabricated by HFCVD. A tungsten impurity level of 1018 cm− 3 was detected with secondary ion mass spectroscopy. The full-width at half maximum (FWHM) of the rocking curve (004) was 39.5 arcsec, where that of seed substrates was 42.8 arcsec. A clear free-exciton recombination radiation was observed in cathodoluminescence spectra. The Raman spectra presented a single peak centered at 1333.2 cm− 1 with a FWHM value of 1.9 cm− 1. These results indicate that the HFCVD-grown SCD has good crystalline quality comparable to the seed substrates.
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