Improved Spatial Resolution in Electron Probe Microanalysis of Multilayer Structures

Abstract A method is described to measure composition profiles of layer systems on substrates by electron probe microanalysis with an improved effective spatial resolution down to 0.1 μm. The resolution problem in microanalysis of angle lapped layers and the related experimental problems are discussed and examples of composition profile measurements at GaAs‐Al x Ga 1– x As double‐heterostructures are presented.