<title>Cutting of optical materials by using femtosecond laser pulses</title>

In the past years, ultrashort pulse lasers have been established as precise and universal tools for the microstructuring of solid materials. Since thermal and mechanical influences are minimized, the application of this technology is also suitable for the structuring of optical materials and opens new possibilities. In this paper, the influence of pulse duration, pulse energy (fluence) and polarization on the cutting quality for glass and silicon will be discussed. As a concrete application, the cutting and micromarking of dielectric coated mirrors for high power fiber lasers will be highlighted.