Application of SERS to study chemical vapour deposition processes: the example of diamond films

The use of surface-enhanced Raman scattering (SERS) for chemical vapor deposition (CVD) investigations is reviewed. As an example, CVD diamond growth from CH4 and H2 assisted by a hot filament was studied in situ using SERS. trans- Polyacetylene formation during diamond growth was clearly demonstrated. The possible role of polyacetylene in diamond formation is discussed. © 1998 John Wiley & Sons, Ltd.