微电子
材料科学
光电探测器
光电二极管
光电子学
硅
制作
纳米技术
纳米-
范德瓦尔斯力
平面的
灵活性(工程)
炸薯条
计算机科学
复合材料
医学
病理
计算机图形学(图像)
有机化学
化学
数学
替代医学
分子
统计
电信
作者
Songlin Li,Lei Zhang,Xiaolan Zhong,Marco Gobbi,Simone Bertolazzi,Wei Guo,Bin Wu,Yunqi Liu,Ning Xu,Weiyu Niu,Yong Hao,Emanuele Orgiu,Paolo Samorı́
出处
期刊:ACS Nano
[American Chemical Society]
日期:2019-02-13
被引量:7
标识
DOI:10.1021/acsnano.9b00889
摘要
The spatially precise integration of arrays of micropatterned two-dimensional (2D) crystals onto three-dimensionally structured Si/SiO2 substrates represents an attractive, low-cost system-on-chip strategy toward the realization of extended functions in silicon microelectronics. However, the reliable integration of such atomically thin arrays on planar patterned surfaces has proven challenging due to their poor adhesion to underlying substrates, as ruled by weak van der Waals interactions. Here, we report on an integration method utilizing the flexibility of the atomically thin crystals and their physical subsidence in liquids, which enables the reliable fabrication of the micropatterned 2D materials/Si arrays. Our photodiode devices display peak sensitivity as high as 0.35 A/W and external quantum efficiency (EQE) of ∼90%. The nano-subsidence technique represents a viable path to on-chip integration of 2D crystals onto silicon for advanced microelectronics.
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