Air-coupled PMUTs array with residual stresses: experimental tests in the linear and non-linear dynamic regime

The mechanical characterization of a 4 × 4 air-coupled array of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) is presented. The experimental campaign consists of three set of experimental tests, namely: topography measurements, small signal dynamic measurements, and vibrometry in the non-linear dynamic regime. The behavior of three different kinds of PMUT are reported. They differ according to the thermo-electrical treatment that has been applied to the piezoelectric material. The presence of the fabrication induced residual stresses is investigated and the treatment effect is evaluated in terms of the initial deflected configuration. The results reported in this paper represent an experimental mechanical investigation useful for the design of PMUT structures with advanced functionalities in the linear and non-linear regime.