Room-temperature nanocontact printing using soft template

Direct pattern transfer technology by room-temperature nanocontact printing using hydrogen silsesquioxane (HSQ) and Ag paste, which takes advantage of adhesion properties of these transfer materials, has been developed. The use of poly(ethylene) laminated on poly(methylmethacrylate) sheet has been proposed as the soft template for the contact printing. The HSQ transferred pattern with 35nm linewidth was obtained onto Si surface. In addition, 1μm linewidth, and 2μm pitch Ag patterns were successfully transferred from the soft template to the SiO2∕Si substrate. The transferred Ag wiring with 1μm linewidth showed good conduction characteristic, resistivity to be 1.7×10−7Ωm.