A Valveless Piezoelectric Micropump with Flexure Connection Structure

This work reports a valveless piezoelectric micropump with high pressure load and high flowrate. The experimental results showed that the maximum displacement of the actuator and the output flowrate of the micropump could reach 18.4 μm and 308 mL/min under zero pressure load, respectively, which was highly consistent with the numerical analysis. The maximum output pressure reached 47 kPa, and the pump was extremely stable under various temperatures from room temperature to 80°C, with frequency variations of only −150 Hz. The micropump demonstrated its great potential for wearable/portable application, especially for blood pressure monitoring.