光学
双折射
校准
光弹性
图像拼接
相位板
波长
相(物质)
物理
度量(数据仓库)
计算机科学
激光器
量子力学
数据库
热力学
固体力学
作者
Yang Gao,Xinjun Wan,ZhenLei Wang,Xiaoxiao Wei
出处
期刊:Applied Optics
[Optica Publishing Group]
日期:2023-01-17
卷期号:62 (5): 1237-1237
被引量:4
摘要
into the correction process for the phase delay, derive the correction equation, and give a theoretical comparison of the relative error curves. The results show that the correction method can theoretically limit the maximum amount of error. Finally, we have verified the accuracy of the method by measurements of the internal lens stress before and after the correction and by stitching measurements on SiC wafers.
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