A fully integrated high power RF MEMS switch in package

We report a high power laminate switch for radio frequency (RF) applications. This switch can be embedded within RF circuits or serve as a standalone component. For various RF applications, we demonstrated how switch, RF and mechanical performances are correlated to each other by varying the design parameters. Low contact resistance, 0.3 Ω and decent RF performance, -0.35 dB insertion loss and -18 dB isolation at 9 GHz were achieved.