Fast femtosecond laser ablation for efficient cutting of sintered alumina and quartz substrates
作者
Reece N. Oosterbeek,Thomas Z. Ward,Carsten Corazza,Owen Bodley,Simon Ashforth,Andrew E. Rodda,M. Cather Simpson
出处
期刊:Conference on Lasers and Electro-Optics日期:2016-01-01卷期号:16: JW2A.11-JW2A.11被引量:1
标识
DOI:10.1364/cleo_at.2016.jw2a.11
摘要
Ultrafast laser machining of ceramic and crystalline substrates offers many benefits versus mechanical dicing. We optimized femtosecond laser parameters for cutting industry sintered alumina and quartz wafers, yielding drastic improvements in cutting speed and quality.