Preparation and Performance Study of Si-DLC Based on Ion Deposition of Different Multiple Gradient Transition Layers

In order to improve the lower adhesion strength of Si-DLC coatings to the substrate and enhance its wear resistance, Si-DLC coatings with different transition layers (AlTiSiN, AlCrN and AlTiCrN) were prepared on 304 austenitic stainless steel substrates using multi-arc ion plating technique. The effects of different transition layers on the properties of Si-DLC were characterized by scanning electron microscopy, X-ray diffractometer, nanoindentation, confocal microscopy, Rockwell hardness tester, Raman test and wear test to find the optimal Si-DLC transition layer. The results show that the Si-DLC coating with AlTiSiN as the transition layer has an ID/IG of 0.71, the highest hardness of 26.7 Gpa, low surface roughness, the highest compressive stress, the best bond strength and the best wear resistance.