Highly Sensitive Flexible Pressure Sensor Based on Silver Nanowires-Embedded Polydimethylsiloxane Electrode with Microarray Structure

材料科学 聚二甲基硅氧烷 压力传感器 电极 纳米技术 聚偏氟乙烯 传感器阵列 光电子学 图层(电子) 计算机科学 复合材料 聚合物 化学 物理化学 物理 机器学习 热力学
作者
Xingtian Shuai,Pengli Zhu,Wenjin Zeng,Yougen Hu,Xianwen Liang,Yu Zhang,Rong Sun,Ching‐Ping Wong
出处
期刊:ACS Applied Materials & Interfaces [American Chemical Society]
卷期号:9 (31): 26314-26324 被引量:252
标识
DOI:10.1021/acsami.7b05753
摘要

Flexible pressure sensors have attracted increasing research interest because of their potential applications for wearable sensing devices. Herein, a highly sensitive flexible pressure sensor is exhibited based on the elastomeric electrodes and a microarray architecture. Polydimethylsiloxane (PDMS) substrate, coated with silver nanowires (AgNWs), is used as the top electrode, while polyvinylidene fluoride (PVDF) as the dielectric layer. Several transfer processes are applied on seeking facile strategy for the preparation of the bottom electrode via embedding AgNWs into the PDMS film of microarray structure. The flexible pressure sensor integrates the top electrode, dielectric layer, and microarray electrode in a sandwich structure. It is demonstrated that such sensors possess the superiorities of high sensitivity (2.94 kPa-1), low detection limit (<3 Pa), short response time (<50 ms), excellent flexibility, and long-term cycle stability. This simple process for preparing such sensors can also be easily scaled up to construct pressure sensor arrays for detecting the intensity and distribution of the loaded pressure. In addition, this flexible pressure sensor exhibits good performance even in a noncontact way, such as detecting voice vibrations and air flow. Due to its superior performance, this designed flexible pressure sensor demonstrates promising potential in the application of electronic skins, as well as wearable healthcare monitors.
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