The surface constitutions of Zn ZSM 5, Gr ZSM 5 and F ZSM 5 were examined by XPS. The catalytic activities before and after steam treatment of the various modified ZSM5 samples were investigated by cracking reaction of n Hexadecane. The results showed (1) ZSM 5 samples underwent de aluminum of framework during the process of steaming and their cracking activities decreased dramatically; (2)After steam treatment, the cracking activities of HZSM 5 modified by ZnCl 2, CrCl 3 in creased obviously, so did the cracking activity of HZSM 5 modified by NH 4F.