Thermal Decomposition of Copper Bis(hexafluoroacetylacetonate)

Abstract : Decomposition of the vapor phase of copper bis(hexafluoroacetylacetonate) under the effect of thermal activation was studied. It was found that the temperature at which the decomposition is carried out influences the chemical composition of deposits; the higher the temperature, the more carbon is incorporated. It is believed that this is the first time it has been demonstrated that metal-ligand decomposition in the copper compound has to be effected below the ligand decomposition temperature.