Force / vibration detection by cantilever embedded in PDMS for strain gauge and piezoelectric tactile sensor

In our previous work, it is demonstrated that multi-axial force and can be detected by tactile sensor using Si microcantilevers with thin-film strain gauge embedded in the elastomer. In this work, Si microcantilever with PZT thin film was fabricated and characterized. The cantilever was embedded in the elastomer to detect vibrations. As a result, it is confirmed that the output voltage from PZT on the fabricated microcantilever depends on frequency of applied vibration. Furthermore, the cantilever was thinned by dry etching process for improve the sensitivity. It was suggested that sensitivity can be controlled by thinning the cantilever. Moreover, a strain gauge and a piezoelectric detector were deposited on a single cantilever, and a sensor for measuring static load and vibration was fabricated.