Research on reliability of microelectronic devices

With the development of technology,information processing efficiency is continuously improved and microelectronic devices get smaller and smaller,thus the microelectronic device reliability becomes increasingly important.Microelectronic device reliability is mainly affected by the gate oxide,hot carriers,metallization,and electrostatic discharge.Based on a review of the research progress at home and abroad,this paper introduces the four factors that influence the reliability of microelectronic devices,and analyzes the action mechanism.Finally,some methods for solving these problems are suggested.