Highly Stable Epitaxially Crystallized Ferroelectric Hf0.5Zr0.5O2 Films

Financial support from the Spanish Ministry of Science and Innovation (MCIN/AEI/10.13039/501100011033), through the Severo Ochoa FUNFUTURE (CEX2019-000917-S), PID2020-112548RB-I00 and PID2019-107727RB-I00, and from Generalitat de Catalunya (2021 SGR 00804) projects is acknowledged. We also acknowledge project TED2021-130453B–C21, funded by MCIN/AEI/10.13039/501100011033 and European Union NextGeneration EU/PRTR. I.F. acknowledges Ramón y Cajal contract RYC-2017-22531 (Fondo Social Europeo). X.L. and T.S. are financially supported by China Scholarship Council (CSC) with No.202206180011 and 201807000104, respectively. X.L. and T.S. work have been done as a part of their Ph.D. program in Materials Science at Universitat Autònoma de Barcelona.