P‐91: The Causes and Improvement of Circular Mura in Micro OLED Displays

There is a huge impact on the image quality of Micro‐OLED display in the production, which looks like a white ring or white dot under the microscope. This phenomenon is called Circular Mura in this paper. The root caucus locks in the common effect of residual sulfur hexafluoride (SF6) and the solution of ethyl ketocy clazocine (EKC) on the anode surface. Circular Mura was finally successfully solved through equipment modification and process optimization.