Effect of Magnetic Field on Permeability of Electroplated Permalloy for Microdevices

We have investigated the effect of a magnetic field on an electroplated Ni 79 Fe 21 film. We have succeeded in the formation of a Ni 79 Fe 21 (permalloy) film with high permeability by applying the magnetic field vertical to the electric field during the electroplating process. In a conventional NiFe electroplating process, annealing is required to obtain a stable Ni 79 Fe 21 film after electroplating. This process without annealing is useful for fabricating Ni 79 Fe 21 films for flexible devices and complementary metal oxide semiconductor (CMOS) integration.