Electrochemical processes resulting in migrated short failures in microcircuits

Metals can exhibit dendritic short-circuits caused by electrochemical migration in conductor-insulator structures, which may result in failures and reliability problems in microcircuits. The classical model of electrochemical migration has been well known for several decades. This process is a transport of metal ions between two metallization stripes under bias through a continuous aqueous electrolyte. Due to the electrodeposition at the cathode, dendrites and dendrite-like deposits are formed. Ultimately, such a deposit can lead to a short circuit in the device and can clause catastrophic failure. A few anomalous and newly discovered phenomena have initiated us to perform some revisions and to add supplementary models to the conventional one. A theoretical review based on practical results is given about the most important possible processes. Material design aspects are also discussed.< >