An atomic level surface fabricated using a developed polisher for martensitic stainless steel using novel chemical mechanical polishing

. Citric acid dissolved the oxides through coordination between carboxyl groups and metal ions. Disodium ethylenediaminetetraacetic acid chelated with trivalent iron ions and chromium hydroxides. Our outcomes pave a new way to fabricate an atomic level surface on martensitic stainless steel, using a new environmentally friendly slurry and CMP.