Parylene C(PC) film prepared by means of thermal chemical vapor deposition polymerization had excellent barrier properties and was widely used in many fields.But its application was limited in some extent due to its poor impact resistance.In order to overcome this limitation,a UV-cured flexible film was developed for protection of the PC film.The results show that the UV-cured film had high adhesion to PC(zero level),good flexibility and acid resistance.Both the elongation at break and impact strength of PC film with UV-cured film had all been greatly improved.And the combined film had an improved hydrogen and air barrier property while the moisture permeability had no change.