压力传感器
压力测量
声学
材料科学
方波
机械
高压
计算机科学
作者
Tsing-Tshih Tsung,Lee-Long Han
标识
DOI:10.1088/0957-0233/15/6/013
摘要
In this study, we measured the dynamic characteristics of pressure sensors using a pressure square-like wave generator (PSWG). With high excitation energy, the PSWG can measure dynamic pressure and work more effectively in a high frequency range. Under the same experimental parameters (10 bar, 600 Hz), the performance of six pressure sensors of dissimilar design and structure was evaluated. The experimental results indicate that they all exhibited extremely different dynamic characteristics. The dynamic pressure sensors based on quartz plates and crystals possess larger overshoot, greater gain margin and shorter rise time in comparison with other sensors based on strain gauge and piezoresistive materials. Compared with other traditional methods, such as the hydraulic control method, the PSWG proves to be superior in that it can be employed to evaluate the dynamic performances of pressure sensors at high frequency of above 10 kHz.
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