Real-time observation and synchronous nanomanipulation platform based on microlens and atomic force microscopy coupling

Nanomanipulation based on atomic force microscopy (AFM) is widely used in various fields, including nanoparticle assembly, nanostructure construction, and semiconductor device manufacturing. However, a challenge remains in the lack of nanoscale visual feedback, which limits operational efficiency and accuracy. Here, we present a method for nanomanipulation under the visual guidance of real-time super-resolution imaging. The method involves coupling a microlens to the end of a conventional AFM probe cantilever and depositing a diamond tip onto the surface of the microlens using focused ion beam (FIB). The resulting microlens-AFM probe enhances the imaging resolution of traditional AFM optical systems, providing super-resolution capability with a multiple 3× increase in optical imaging magnification and enabling synchronous imaging and manipulation of silver nanowires with a characteristic size of 200 nm. This advancement bridges the key gap in AFM-based nanomanipulation by providing in-situ, real-time, non-destructive, and ultra-high-resolution visual feedback. This technology has the potential to provide new methods and key technologies for research in a wide range of applications, including nanorobots, nanoobservation, nanomanipulation, and manufacturing.