Low-loss photonic integrated circuits for UV applications

We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm).Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm.The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited.Lower losses can be achieved by further optimization of the cross-section of the waveguides.In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.