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130 积分 2026-07-02 加入
Atomic layer etching of Si3N4 with high selectivity to SiO2 and poly-Si
2个月前
已完结
Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layers
2个月前
已关闭
Boron and high-k dielectrics: Possible fourth etch stop colors for multipattern optical lithography processing
2个月前
已完结
The addition of strain in uniaxially strained transistors by both SiN contact etch stop layers and recessed SiGe sources and drains
2个月前
已完结
Atomic layer etching technique for InAlN/GaN heterostructure with AlN etch-stop layer
3个月前
已完结