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350 积分 2022-09-14 加入
Methods for Uniform Wet Etching in Narrow Trenches and Vias
6天前
已完结
Improvement of SiO2 surface morphology during the selective Si3N4 etching in the multi-layered 3D NAND Si3N4/SiO2 stack structures by the generation of CO2 gas through the control of redox reaction
7个月前
已完结
Preventing oxide precipitation in selective wet etching of Si3N4 for 3D-NAND structure fabrication: The role of bubbles
7个月前
已完结
Thin Layer Etching of Silicon Nitride: Comparison of Downstream Plasma, Liquid HF and Gaseous HF Processes for Selective Removal after Light Ion Implantation
7个月前
已完结
Passivation of poly-Si surface using vinyl and epoxy group additives for selective Si3N4 etching in H3PO4 solution
7个月前
已完结
Selective functionalization of silicon nitride with a water-soluble etch-resistant polymer
7个月前
已完结
Improvement of Si3N4/SiO2 etching selectivity through the passivation of SiO2 surface in aromatic carboxylic acid-added H3PO4 solutions for the 3D NAND integration
7个月前
已完结
Study on the SiO2 Wet-Etching Mechanism Using γ-Ureidopropyltriethoxysilane as an Inhibitor for 3D NAND Fabrication
7个月前
已完结
Wet‐Chemical Etching of Silicon Wafer Surfaces Using Aqueous HF‐HBrO 3 and HF‐HBrO 3 ‐Br 2 Solutions
7个月前
已完结
Highly Selective Etching of Silicon Dioxide Over Aluminum Using Mixtures of Sulfuric Acid and Hydrofluoric Acid
7个月前
已关闭
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