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170 积分 2021-05-22 加入
Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments
21天前
已完结
Plasma-enhanced atomic layer deposition of SiO2 film using capacitively coupled Ar/O2 plasmas: A computational investigation
2个月前
已完结
Fluorocarbon (C4F8) assisted plasma-enhanced atomic layer etching of SiO2 with high repeatability of cycles in industrial ICP reactor. II. Simulation
2个月前
已完结
Etch-stop mechanisms in plasma-enhanced atomic layer etching of silicon nitride: A molecular dynamics study
2个月前
已完结
Fluorocarbon (C4F8) assisted plasma-enhanced atomic layer etching of SiO2 with high repeatability of cycles in industrial ICP reactor. II. Simulation
2个月前
已关闭
Microkinetic based growth and property modeling of plasma enhanced atomic layer deposition silicon nitride thin film
2个月前
已完结
Atomistic insights into ion irradiation effects in plasma-enhanced atomic layer deposition of silicon nitride
2个月前
已完结
Atomic Layer Deposition
8个月前
已完结
Atomic Layer Deposition
8个月前
已关闭
Predictive model for the discovery of sinter-resistant supports for metallic nanoparticle catalysts by interpretable machine learning
11个月前
已完结
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