| 标题 |
[高分]
Precursor characterization for ALD of cobalt thin films |
| 网址 | |
| DOI | |
| 其它 | Georgi A, Lehmann M, Roeder A, et al. Precursor characterization for ALD of cobalt thin films[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2014, 32(2): 021508. |
| 求助人 | |
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(2025-6-4)